With the following privacy policy we would like to inform you which types of your personal data (hereinafter also abbreviated as "data") we process for which purposes and in which scope. The privacy statement applies to all processing of personal data carried out by us, both in the context of providing our services and in particular on our websites, in mobile applications and within external online presences, such as our social media profiles (hereinafter collectively referred to as "online services").
The terms used are not gender-specific.
Last Update: 30. March 2023
ITK Dr. Kassen GmbH
Beim Eberacker 3
35633 Lahnau
Deutschland
Dr.-Ing. Ingolf Schäfer (Geschäftsführung)
E-mail address: Phone:+49-(0)6441-65005-0
Legal Notice:https://www.itknet.de/impressum/
QS-Kornmann -Sandra Kornmann-
Michael Kornmann
Sudetenstrasse 33
35625 Hüttenberg
Deutschland
Telefon: 06403 9295287
E-Mail: mk@qs-kornmann.de
The following table summarises the types of data processed, the purposes for which they are processed and the concerned data subjects.
Below you will find an overview of the legal basis of the GDPR on the basis of which we process personal data. Please note that in addition to the provisions of the GDPR, national data protection regulations may apply in your or our country of residence or domicile. If, in addition, more specific legal bases are applicable in individual cases, we will inform you of these in the data protection declaration.
In addition to the data protection regulations of the GDPR, national regulations apply to data protection in Germany. This includes in particular the Law on Protection against Misuse of Personal Data in Data Processing (Federal Data Protection Act - BDSG). In particular, the BDSG contains special provisions on the right to access, the right to erase, the right to object, the processing of special categories of personal data, processing for other purposes and transmission as well as automated individual decision-making, including profiling. Furthermore, it regulates data processing for the purposes of the employment relationship (§ 26 BDSG), in particular with regard to the establishment, execution or termination of employment relationships as well as the consent of employees. Furthermore, data protection laws of the individual federal states may apply.
We take appropriate technical and organisational measures in accordance with the legal requirements, taking into account the state of the art, the costs of implementation and the nature, scope, context and purposes of processing as well as the risk of varying likelihood and severity for the rights and freedoms of natural persons, in order to ensure a level of security appropriate to the risk.
The measures include, in particular, safeguarding the confidentiality, integrity and availability of data by controlling physical and electronic access to the data as well as access to, input, transmission, securing and separation of the data. In addition, we have established procedures to ensure that data subjects' rights are respected, that data is erased, and that we are prepared to respond to data threats rapidly. Furthermore, we take the protection of personal data into account as early as the development or selection of hardware, software and service providers, in accordance with the principle of privacy by design and privacy by default.
Masking of the IP address: If IP addresses are processed by us or by the service providers and technologies used and the processing of a complete IP address is not necessary, the IP address is shortened (also referred to as "IP masking"). In this process, the last two digits or the last part of the IP address after a full stop are removed or replaced by wildcards. The masking of the IP address is intended to prevent the identification of a person by means of their IP address or to make such identification significantly more difficult.
TLS encryption (https): To protect your data transmitted via our online services, we use TLS encryption. You can recognize such encrypted connections by the prefix https:// in the address bar of your browser.
In the context of our processing of personal data, it may happen that the data is transferred to other places, companies or persons or that it is disclosed to them. Recipients of this data may include, for example, service providers commissioned with IT tasks or providers of services and content that are embedded in a website. In such cases, the legal requirements will be respected and in particular corresponding contracts or agreements, which serve the protection of your data, will be concluded with the recipients of your data.
If we process data in a third country (i.e. outside the European Union (EU), the European Economic Area (EEA)) or the processing takes place in the context of the use of third party services or disclosure or transfer of data to other persons, bodies or companies, this will only take place in accordance with the legal requirements.
Subject to express consent or transfer required by contract or law, we process or have processed the data only in third countries with a recognised level of data protection, on the basis of special guarantees, such as a contractual obligation through so-called standard protection clauses of the EU Commission or if certifications or binding internal data protection regulations justify the processing (Article 44 to 49 GDPR, information page of the EU Commission: https://ec.europa.eu/info/law/law-topic/data-protection/international-dimension-data-protection_en).
The data processed by us will be erased in accordance with the statutory provisions as soon as their processing is revoked or other permissions no longer apply (e.g. if the purpose of processing this data no longer applies or they are not required for the purpose). If the data is not deleted because they are required for other and legally permissible purposes, their processing is limited to these purposes. This means that the data will be restricted and not processed for other purposes. This applies, for example, to data that must be stored for commercial or tax reasons or for which storage is necessary to assert, exercise or defend legal claims or to protect the rights of another natural or legal person. Our further information on individual processing operations may also contain additional and specific information on data retention and erasure applicable to the respective processing operations.
Cookies are small text files or other data records that store information on end devices and read information from the end devices. For example, to store the login status in a user account, the contents of a shopping cart in an e-shop, the contents accessed or the functions used. Cookies can also be used for various purposes, e.g. for purposes of functionality, security and convenience of online offers as well as the creation of analyses of visitor flows.
Information on consent: We use cookies in accordance with the statutory provisions. Therefore, we obtain prior consent from users, except when it is not required by law. In particular, consent is not required if the storage and reading of information, including cookies, is strictly necessary in order to provide an information society service explicitly requested by the subscriber or user. Essential cookies usually include cookies with functions related to the display and operability of the onlineservice, load balancing, security, storage of users' preferences and choices or similar purposes related to the provision of the main and secondary functions of the onlineservice requested by users. The revocable consent will be clearly communicated to the user and will contain the information on the respective cookie use.
Information on legal bases under data protection law: The legal basis under data protection law on which we process users' personal data with the use of cookies depends on whether we ask users for consent. If users consent, the legal basis for processing their data is their declared consent. Otherwise, the data processed with the help of cookies is processed on the basis of our legitimate interests (e.g. in a business operation of our online services and improvement of its usability) or, if this is done in the context of the fulfillment of our contractual obligations, if the use of cookies is necessary to fulfill our contractual obligations. For which purposes the cookies are processed by us, we do clarify in the course of this privacy policy or in the context of our consent and processing procedures.
Retention period: With regard to the retention period, a distinction is drawn between the following types of cookies:
General information on revocation and objection (opt-out): Users can revoke the consent they have given at any time and also file an objection to processing in accordance with the legal requirements in Article 21 GDPR. Users can also declare their objection by means of the settings of their browser, e.g. by deactivating the use of cookies (whereby this may also limit the functionality of our online services). An objection to the use of cookies for online marketing purposes, can also be declared via the websites https://optout.aboutads.info and https://www.youronlinechoices.com/.
Further information on processing methods, procedures and services used:
We process data of our contractual and business partners, e.g. customers and interested parties (collectively referred to as "contractual partners") within the context of contractual and comparable legal relationships as well as associated actions and communication with the contractual partners or pre-contractually, e.g. to answer inquiries.
We process this data in order to fulfill our contractual obligations. These include, in particular, the obligations to provide the agreed services, any update obligations and remedies in the event of warranty and other service disruptions. In addition, we process the data to protect our rights and for the purpose of administrative tasks associated with these obligations and company organization. Furthermore, we process the data on the basis of our legitimate interests in proper and economical business management as well as security measures to protect our contractual partners and our business operations from misuse, endangerment of their data, secrets, information and rights (e.g. for the involvement of telecommunications, transport and other auxiliary services as well as subcontractors, banks, tax and legal advisors, payment service providers or tax authorities). Within the framework of applicable law, we only disclose the data of contractual partners to third parties to the extent that this is necessary for the aforementioned purposes or to fulfill legal obligations. Contractual partners will be informed about further forms of processing, e.g. for marketing purposes, within the scope of this privacy policy.
Which data are necessary for the aforementioned purposes, we inform the contracting partners before or in the context of the data collection, e.g. in online forms by special marking (e.g. colors), and/or symbols (e.g. asterisks or the like), or personally.
We delete the data after expiry of statutory warranty and comparable obligations, i.e. in principle after expiry of 4 years, unless the data is stored in a customer account or must be kept for legal reasons of archiving. The statutory retention period for documents relevant under tax law as well as for commercial books, inventories, opening balance sheets, annual financial statements, the instructions required to understand these documents and other organizational documents and accounting records is ten years and for received commercial and business letters and reproductions of sent commercial and business letters six years. The period begins at the end of the calendar year in which the last entry was made in the book, the inventory, the opening balance sheet, the annual financial statements or the management report was prepared, the commercial or business letter was received or sent, or the accounting document was created, furthermore the record was made or the other documents were created.
If we use third-party providers or platforms to provide our services, the terms and conditions and privacy policies of the respective third-party providers or platforms shall apply in the relationship between the users and the providers.
We process user data in order to be able to provide them with our online services. For this purpose, we process the IP address of the user, which is necessary to transmit the content and functions of our online services to the user's browser or terminal device.
Further information on processing methods, procedures and services used:
When contacting us (e.g. via mail, contact form, e-mail, telephone or via social media) as well as in the context of existing user and business relationships, the information of the inquiring persons is processed to the extent necessary to respond to the contact requests and any requested measures.
Further information on processing methods, procedures and services used:
We use platforms and applications of other providers (hereinafter referred to as "Conference Platforms") for the purpose of conducting video and audio conferences, webinars and other types of video and audio meetings (hereinafter collectively referred to as "Conference"). When using the Conference Platforms and their services, we comply with the legal requirements.
Data processed by Conference Platforms: In the course of participation in a Conference, the Data of the participants listed below are processed. The scope of the processing depends, on the one hand, on which data is requested in the context of a specific Conference (e.g., provision of access data or clear names) and which optional information is provided by the participants. In addition to processing for the purpose of conducting the conference, participants' Data may also be processed by the Conference Platforms for security purposes or service optimization. The processed Date includes personal information (first name, last name), contact information (e-mail address, telephone number), access data (access codes or passwords), profile pictures, information on professional position/function, the IP address of the internet access, information on the participants' end devices, their operating system, the browser and its technical and linguistic settings, information on the content-related communication processes, i.e. entries in chats and audio and video data, as well as the use of other available functions (e.g. surveys). The content of communications is encrypted to the extent technically provided by the conference providers. If participants are registered as users with the Conference Platforms, then further data may be processed in accordance with the agreement with the respective Conference Provider.
Logging and recording: If text entries, participation results (e.g. from surveys) as well as video or audio recordings are recorded, this will be transparently communicated to the participants in advance and they will be asked - if necessary - for their consent.
Data protection measures of the participants: Please refer to the data privacy information of the Conference Platforms for details on the processing of your data and select the optimum security and data privacy settings for you within the framework of the settings of the conference platforms. Furthermore, please ensure data and privacy protection in the background of your recording for the duration of a Conference (e.g., by notifying roommates, locking doors, and using the background masking function, if technically possible). Links to the conference rooms as well as access data, should not be passed on to unauthorized third parties.
Notes on legal bases: Insofar as, in addition to the Conference Platforms, we also process users' data and ask users for their consent to use contents from the Conferences or certain functions (e.g. consent to a recording of Conferences), the legal basis of the processing is this consent. Furthermore, our processing may be necessary for the fulfillment of our contractual obligations (e.g. in participant lists, in the case of reprocessing of Conference results, etc.). Otherwise, user data is processed on the basis of our legitimate interests in efficient and secure communication with our communication partners.
Further information on processing methods, procedures and services used:
The application process requires applicants to provide us with the data necessary for their assessment and selection. The information required can be found in the job description or, in the case of online forms, in the information contained therein.
In principle, the required information includes personal information such as name, address, a contact option and proof of the qualifications required for a particular employment. Upon request, we will be happy to provide you with additional information.
If made available, applicants can submit their applications via an online form. The data will be transmitted to us encrypted according to the state of the art. Applicants can also send us their applications by e-mail. Please note, however, that e-mails on the Internet are generally not sent in encrypted form. As a rule, e-mails are encrypted during transport, but not on the servers from which they are sent and received. We can therefore accept no responsibility for the transmission path of the application between the sender and the reception on our server. For the purposes of searching for applicants, submitting applications and selecting applicants, we may make use of the applicant management and recruitment software, platforms and services of third-party providers in compliance with legal requirements. Applicants are welcome to contact us about how to submit their application or send it to us by regular mail.
Processing of special categories of data: If special categories of personal data within the meaning of Article 9 (1) GDPR (e.g. health data, such as severely handicapped status or ethnic origin) are requested from applicants within the framework of the application procedure, so that the responsible person or the person concerned can exercise his/her rights arising from labour law and social security and social protection law and fulfil his/her duties in this regard, their processing shall be carried out in accordance with Article 9 (1)(b) GDPR, in the case of the protection of vital interests of applicants or other persons pursuant to Article 9 (1)(c) GDPR or for the purposes of preventive health care or occupational medicine, for the assessment of the employee's ability to work, for medical diagnostics, care or treatment in the health or social sector or for the administration of systems and services in the health or social sector in accordance with Article 9 (1)(h) GDPR. In the case of a communication of special categories of data based on voluntary consent, their processing is carried out on the basis of Article 9 (1)(a) GDPR.
Ereasure of data: In the event of a successful application, the data provided by the applicants may be further processed by us for the purposes of the employment relationship. Otherwise, if the application for a job offer is not successful, the applicant's data will be deleted. Applicants' data will also be deleted if an application is withdrawn, to which applicants are entitled at any time. Subject to a justified revocation by the applicant, the deletion will take place at the latest after the expiry of a period of six months, so that we can answer any follow-up questions regarding the application and comply with our duty of proof under the regulations on equal treatment of applicants. Invoices for any reimbursement of travel expenses are archived in accordance with tax regulations.
Admission to a talent pool - Admission to an talent pool, if offered, is based on consent. Applicants are informed that their consent to be included in the talent pool is voluntary, has no influence on the current application process and that they can revoke their consent at any time for the future.
We send newsletters, e-mails and other electronic communications (hereinafter referred to as "newsletters") only with the consent of the recipient or a legal permission. Insofar as the contents of the newsletter are specifically described within the framework of registration, they are decisive for the consent of the user. Otherwise, our newsletters contain information about our services and us.
In order to subscribe to our newsletters, it is generally sufficient to enter your e-mail address. We may, however, ask you to provide a name for the purpose of contacting you personally in the newsletter or to provide further information if this is required for the purposes of the newsletter.
Double opt-in procedure: The registration to our newsletter takes place in general in a so-called Double-Opt-In procedure. This means that you will receive an e-mail after registration asking you to confirm your registration. This confirmation is necessary so that no one can register with external e-mail addresses.
The registrations for the newsletter are logged in order to be able to prove the registration process according to the legal requirements. This includes storing the login and confirmation times as well as the IP address. Likewise the changes of your data stored with the dispatch service provider are logged.
Deletion and restriction of processing: We may store the unsubscribed email addresses for up to three years based on our legitimate interests before deleting them to provide evidence of prior consent. The processing of these data is limited to the purpose of a possible defense against claims. An individual deletion request is possible at any time, provided that the former existence of a consent is confirmed at the same time. In the case of an obligation to permanently observe an objection, we reserve the right to store the e-mail address solely for this purpose in a blocklist.
The logging of the registration process takes place on the basis of our legitimate interests for the purpose of proving its proper course. If we commission a service provider to send e-mails, this is done on the basis of our legitimate interests in an efficient and secure sending system.
Contents:Information about us, our services, promotions and offers.
Further information on processing methods, procedures and services used:
We process personal data for the purposes of promotional communication, which may be carried out via various channels, such as e-mail, telephone, post or fax, in accordance with the legal requirements.
The recipients have the right to withdraw their consent at any time or to object to the advertising communication at any time.
After revocation or objection, we store the data required to prove the past authorization to contact or send up to three years from the end of the year of revocation or objection on the basis of our legitimate interests. The processing of this data is limited to the purpose of a possible defense against claims. Based on the legitimate interest to permanently observe the revocation, respectively objection of the users, we further store the data necessary to avoid a renewed contact (e.g. depending on the communication channel, the e-mail address, telephone number, name).
We maintain online presences within social networks and process user data in this context in order to communicate with the users active there or to offer information about us.
We would like to point out that user data may be processed outside the European Union. This may entail risks for users, e.g. by making it more difficult to enforce users' rights.
In addition, user data is usually processed within social networks for market research and advertising purposes. For example, user profiles can be created on the basis of user behaviour and the associated interests of users. The user profiles can then be used, for example, to place advertisements within and outside the networks which are presumed to correspond to the interests of the users. For these purposes, cookies are usually stored on the user's computer, in which the user's usage behaviour and interests are stored. Furthermore, data can be stored in the user profiles independently of the devices used by the users (especially if the users are members of the respective networks or will become members later on).
For a detailed description of the respective processing operations and the opt-out options, please refer to the respective data protection declarations and information provided by the providers of the respective networks.
Also in the case of requests for information and the exercise of rights of data subjects, we point out that these can be most effectively pursued with the providers. Only the providers have access to the data of the users and can directly take appropriate measures and provide information. If you still need help, please do not hesitate to contact us.
Further information on processing methods, procedures and services used:
Within our online services, we integrate functional and content elements that are obtained from the servers of their respective providers (hereinafter referred to as "third-party providers"). These may, for example, be graphics, videos or city maps (hereinafter uniformly referred to as "Content").
The integration always presupposes that the third-party providers of this content process the IP address of the user, since they could not send the content to their browser without the IP address. The IP address is therefore required for the presentation of these contents or functions. We strive to use only those contents, whose respective offerers use the IP address only for the distribution of the contents. Third parties may also use so-called pixel tags (invisible graphics, also known as "web beacons") for statistical or marketing purposes. The "pixel tags" can be used to evaluate information such as visitor traffic on the pages of this website. The pseudonymous information may also be stored in cookies on the user's device and may include technical information about the browser and operating system, referring websites, visit times and other information about the use of our website, as well as may be linked to such information from other sources.
Further information on processing methods, procedures and services used:
We kindly ask you to inform yourself regularly about the contents of our data protection declaration. We will adjust the privacy policy as changes in our data processing practices make this necessary. We will inform you as soon as the changes require your cooperation (e.g. consent) or other individual notification.
If we provide addresses and contact information of companies and organizations in this privacy policy, we ask you to note that addresses may change over time and to verify the information before contacting us.
As data subject, you are entitled to various rights under the GDPR, which arise in particular from Articles 15 to 21 of the GDPR:
This section provides an overview of the terms used in this privacy policy. Many of the terms are drawn from the law and defined mainly in Article 4 GDPR. The legal definitions are binding. The following explanations, on the other hand, are intended above all for the purpose of comprehension. The terms are sorted alphabetically.
ITK Dr. Kassen GmbH
Beim Eberacker 3 | D-35633 Lahnau
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Main features
• Available as built-in variants without housing
Technical Data
Parameter | Unit | Typical performance characteristics |
|---|---|---|
Repeatability | µm | 0.1 … 50 |
Traversing speed | mm/s | 0.01 … 5000 |
Acceleration | mm/s2 | 100 mm/s2 … 5 g |
Position resolution | nm | 5 … 1000 |
Travel path | mm | 10 … 500 |
Technical Data
Parameter | Unit | Typical performance features |
|---|---|---|
Travel speed | mm/s | 0.1 … 500 |
Acceleration | mm/s2 | ≤ 1000 |
Repeat accuracy | µm | different classes |
Position resolution | nm | 5 |
Travel range | mm | 50 x 50 … 205 x 205 |
Technical Data
Parameters | Typical performance characteristics |
|---|---|
Scale lengths | 50 - 5000 mm |
Materials | hard magnetic, elastomer-bonded and plastic bonded material |
Track widths | 1 - 5 mm |
Number of tracks | 1 - 3, several coded tracks possible |
Period lengths | 500 - 5000 µm |
Accuracy | up to the sub-µm range (compensated) |
Resolution | in the nanometre range |
Writing method | digital or analogue |
Software | customised operating and evaluation software |
Quality inspection | scale measurement on the same system |
Typical operating conditions | industrial continuous operation (24/7) |
Labelling | each scale can be individually marked |
Technical Data
Parameter | Unit | Typical performance characteristics |
|---|---|---|
Repeatability | arcsec | 2 … 36 |
Axial runout | µm | 3 … 10 |
Radial runout | µm | 3 … 20 |
Mass to be moved | kg | 5 … 10 |
Hollow shaft | mm | 40 … 50 |
Diameter | mm | 100, 200 |
Main features
We can offer you stepper motors in a wide range of performance classes and torque curves. It does not matter whether in an industrial environment in clean rooms or in a dirty environment.
Key features
Technical Data
Parameter | Unit | Typical performance characteristics |
|---|---|---|
Repeatability | arcsec | 2 … 36 |
Axial runout | µm | 3 … 10 |
Radial runout | µm | 3 … 20 |
Mass to be moved | kg | 5 … 10 |
Hollow shaft | mm | 40 … 50 |
Diameter | mm | 50 … 300 |
Technical Data
Parameter | Unit | Typical performance characteristics |
|---|---|---|
Load capacity | kg | 0.5 … 5 |
Travel speed in X & Y | m/s | 0.25 ... 1 |
Acceleration in X & Y | m/s2 | 0.5 … 10 |
Repeatability bidirectional | µm | ≤ ±1 |
Positioning accuracy bidirectional | µm | ≤ ±20 … ≤ ±80 |
Resolution | nm | 500 |
Technical Data
Parameter | Typical performance characteristics |
|---|---|
Scale diameter | 3.5 - 500 mm (standard) |
Scale materials | hard magnetic, elastomer and plastic bonded material |
Coding placement | optional radial or axial description |
Number of lines | freely selectable |
Number of tracks: | several coded tracks possible; reference marks (polarisation adjustable) |
Repeatability: | from 5 arcsec (depending on reference measuring system and material) |
Resolution | up to 0.5 arcsec |
Writing method | digital or analogue |
Software | customised operating and evaluation software optional |
Quality inspection: | scale measurement on the same system optional |
Typical conditions of use | industrial continuous operation (24/7) |
Marking | each scale can be individually labelled. |
Technical Data
Parameter | Unit | Typical performance characteristics |
|---|---|---|
Repeat accuracy | µm | 0.1 … 50 |
Traversing speed | mm/s | 0.01 … 5000 |
Acceleration | mm/s2 | 100 mm/s2 … 5 g |
Position resolution | nm | 5 … 1000 |
Travel path | mm | 10 … 10.000 |
Technical Data
Parameter | Unit | Typical performance characteristics |
|---|---|---|
Repeatability | µm | 0.1 … 50 |
Traversing speed | mm/s | 0.01 … 5000 |
Acceleration | mm/s2 | 100 mm/s2 … 5 g |
Position resolution | nm | 5 … 1000 |
Travel path | mm | 10 … 10000 |
Technical Data
Parameter | Unit | Typical performance characteristics |
|---|---|---|
Repeatability | µm | 0.1 … 50 |
Traversing speed | mm/s | 0.01 … 5000 |
Acceleration | mm/s2 | 100 mm/s2 … 5 g |
Position resolution | nm | 5 … 1000 |
Travel path | mm | 10 … 500 |
Main features
Key features
Technical Data
Parameter | Unit | Typical performance characteristics |
|---|---|---|
DC link voltage | Vac | 0 … 48 |
Max. Phase current | A | 2,5 … 50 |
Supported motor types | mm/s2 | Linear-, Stepper-, Voice Coil- Servo-, DC-Motoren |
Position resolution | nm | 5 … 1000 |
Real-time trigger | ✓ | |
Interface compatibility | ✓ | |
Manual control units | ✓ | |
Safety functions | ✓ |
Main features
Main features
Main features
Main features
Main features
Technical Data
Parameter | Unit | Typical performance characteristics |
|---|---|---|
DC link voltage | Vac | 0 … 48 |
Max. Phase current | A | 2,5 … 50 |
Supported motor types | mm/s2 | Linear-, Stepper-, Voice Coil- Servo-, DC-Motoren |
Position resolution | nm | 5 … 1000 |
Real-time trigger | ✓ | |
Interface compatibility | ✓ | |
Manual control units | ✓ | |
Safety functions | ✓ |
Main features
Main features
Main features
Technical Data
Parameter | Unit | Typical performance characteristics |
|---|---|---|
DC link voltage | Vac | 0 … 48 |
Max. Phase current | A | 2,5 … 50 |
Supported motor types | mm/s2 | Linear-, Stepper-, Voice Coil- Servo-, DC-Motoren |
Position resolution | nm | 5 … 1000 |
Real-time trigger | ✓ | |
Interface compatibility | ✓ | |
Manual control units | ✓ | |
Safety functions | ✓ |
Technical Data
Parameter | Unit | Typical performance characteristics |
|---|---|---|
Travel speed in X | m/s | 0.5 … 2.5 |
Travel speed in Y | m/s | 0.5 … 0.8 |
Acceleration in X | m/s2 | 5 … 50 |
Acceleration in Y | m/s2 | 0.5 … 5 |
Repeatability bidirectional | µm | ≤ ±0.5 … ≤ ±2.5 |
Positioning accuracy bidirectional | µm | ≤ ±10 … ≤ ±50 |
Resolution | nm | 50 … 500 |
