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MODULES
FROM ITK.

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Modules

03

Modules from ITK

The modular design of all ITK systems is the basis of our flexibility. Our assemblies are subdivided according to the type of movement. The three superordinate assembly categories result in a wide range of linear tables, cross tables and rotary tables. In this context, the interaction with the ITK controls developed in-house should be emphasised.

The control technology is our origin and the decisive factor in exploiting the full performance potential of the mechatronic assemblies. Talk to us about how our in-house software and electronics development can implement your special requirements in a customised way.

FRS200_für Baugruppenheader

Rotary Stages

The extremely flat rotary tables with very high demands on axial run-out, concentricity, repeatability and overall height are among the absolute top class on the market. The central hollow shaft for the feed-through of cables, vacuum or connectors also proves to be particularly advantageous. The rotary tables are intended for applications in the optical industry for measuring and bonding lenses, in measuring machines of all kinds, wire bonding machines or in the semiconductor industry in inspection systems for testing wafers.

Comparison Rotary Stages

Product

Repeatability

Axial run-out

Concentricity 

Mass to be moved

Hollow Shaft

Diameter (in mm) 

FRS

Flat Rotary Stage

■ ■ ■

■ ■

■ ■

■ ■ ■

■ ■ ■

100, 200

RS

Rotary Stage

■ ■ ■

■ ■ ■

■ ■

■ ■ ■

50, 100, 200, 250, 300

Lineartische

Linear Stages

Precision, dynamics and long-term stability form the basis for high throughput rates and reliable operation. Thanks to a new type of linear motor, they are a good alternative to spindle or piezo drives. They are supplied with powerful controllers and other accessories and offer unsurpassed precision. An optimised air bearing design and high-quality guides ensure optimum rigidity, damping and running accuracy, resulting in unsurpassed precision.

Comparison Linear Stages

Product

Repeatability

Travel Speed

Acceleration

Mass to be moved

Travel Path

FLS 100

■ ■ ■

■ ■ ■

■ ■ ■

■ ■

■ ■ ■

LS

■ ■

■ ■

■ ■ ■

■ ■ ■

■ ■ ■

ST9 Eco

■ ■

■ ■ ■

■ ■ ■

STK 50

Kreuztische

Cross Stages

Cross stages from ITK are extremely compact, flat and designed for different travels and accuracies.

Comparison Cross Stages


Product


Repeatability


Travel Speed


Acceleration

Mass To Be Moved

Travel Path

Basic Technology

FCS - ABC

(Flat Cross Stage)


■ ■ ■


■ ■ ■


■ ■ ■


■ ■


■ ■


FLS

KL - XY - ABC (Cross Stage Linear)



■ ■



■ ■



■ ■ ■



■ ■ ■



■ ■ ■



LS


KS - XY - ABC(Cross Stage Spindle)




■ ■


■ ■ ■


■ ■ ■


ST

Nomenclature:

ABC = travel: typically 100 mm

XY: track width of the guide, typically 9, 12, 15 mm

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THEN SUBSCRIBE TO OUR NEWSLETTER!

Privacy Policy*
 

As a newsletter subscriber you agree to our privacy policy.

Are you interested in our products?
Would you like to work with us to find a solution
for your task?
Then contact us. 
We look forward to a constructive exchange!

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Rotary Stage FRS 200

Rundtisch frs200_02

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeatability

arcsec

2 … 36

Axial runout

µm

3 … 10

Radial runout

µm

3 … 20

Mass to be moved

kg

5 … 10

Hollow shaft

mm

40 … 50

Diameter

mm

50 … 300

Rotary Stage RS 180

Rundtisch rs 180

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeatability

arcsec

2 … 36

Axial runout

µm

3 … 10

Radial runout

µm

3 … 20

Mass to be moved

kg

5 … 10

Hollow shaft

mm

40 … 50

Diameter

mm

50 … 300

Linear Stage FLS100

Lineartische

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeat accuracy

µm

0,1 … 50

Traversing speed

mm/s

0,01 … 5000

Acceleration

mm/s2

100mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 10.000

Linear Stage ST9 Eco

ST9 Eco

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeat accuracy

µm

0,1 … 50

Traversing speed

mm/s

0,01 … 5000

Acceleration

mm/s2

100mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 10.000

Linear Stage STK 50

STK 50

Technical data

Parameter

Unit

Typical performance features

Repeatability

µm

0,1 … 50

Travel speed

mm/s

0,01 … 5000

Acceleration

mm/s2

100mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 10.000

Linear Stage LS

LS

Technical data

Parameter

Unit

Typical performance features

Repeatability

µm

0,1 … 50

Travel speed

mm/s

0,01 … 5000

Acceleration

mm/s2

100mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 10.000

Cross Stage FCS100

Kreuztische

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeatability

µm

0,1 … 50

Traversing speed

mm/s

0,01 … 5000

Acceleration

mm/s2

100mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 500

Cross Stage KL12

kl12

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeatability

µm

0,1 … 50

Traversing speed

mm/s

0,01 … 5000

Acceleration

mm/s2

100mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 500

Cross Stage KS15

kl12

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeatability

µm

0,1 … 50

Traversing speed

mm/s

0,01 … 5000

Acceleration

mm/s2

100mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 500

LMT Microscope Stages

LMT

Technical Data

Parameter

Unit

Typical performance features

Travel speed 

mm/s

0.1 … 500

Acceleration

m/s2

0.1 … 10

Repeat accuracy

µm

0.25 … 0.5

Position resolution

nm

5

Travel range

mm

50 x 50 … 205 x 205

LMP linear magnetisation machines

LMP ITK

Technical Data

Parameters

Typical performance characteristics 

Scale lengths

50 - 200 mm

Materials

hard magnetic, soft magnetic

Track widths 

1 - 5 mm

Number of tracks

1 - 3, several coded tracks possible 

Period lengths

500 - 5000 µm

Accuracy

up to the sub-µm range (compensated)

Resolution

in the nanometre range

Writing method

digital or analogue

Software

customised operating and evaluation software 

Quality inspection

scale measurement on the same system

Typical operating conditions

industrial continuous operation (24/7)

Labelling

each scale can be individually marked

Stepper motors

Schrittmotorengruppe

Main features 

We can offer you stepper motors in a wide range of performance classes and torque curves. It does not matter whether in an industrial environment in clean rooms or in a dirty environment.

  • Torque curve can be individually adapted
  • High torque
  • Stronger magnetic field achieves high dynamics with the same rotor moment of inertia
  • Motor connection adapter on request
  • Dampers at the second shaft end improve the synchronisation characteristics
  • ITK’s unique control technology greatly minimises resonance frequencies
  • Suitable for clean rooms

Alpha Torque servomotors

Alphat_Gleichstrommotoren

Key features 

  • High torques over the entire speed range
  • Speed max. 10 r/s
  • Precise MR measuring system absolute measuring
  • Multiturn functionality up to max. 16,000 revolutions
  • Protection class IP65

Gantry Positioning System FBS

v

Technical Data

Parameter

Unit

Typical performance characteristics 

Load capacity

kg

0.5 … 5

Travel speed in X & Y

m/s

0.25 ... 1

Acceleration in X & Y

m/s2

0.5 … 10

Repeatability bidirectional

µm

≤ ±1

Positioning accuracy bidirectional

µm

≤ ±20 … ≤ ±80

Resolution

nm

500

RMP Rotary Magnetisation Machines

RMP itk

Technical Data

Parameter

Typical performance characteristics 

Scale diameter

3.5 - 500 mm (standard) 

Scale materials

hard magnetic, soft magnetic, elastomer and plastic bonded

Coding placement 

optional radial or axial description

Number of lines

freely selectable

Number of tracks:

several coded tracks possible; reference marks (polarisation adjustable)

Repeatability:

from 5 arcsec (depending on reference measuring system and material) 

Resolution

up to 0.5 arcsec

Writing method

digital or analogue

Software 

customised operating and evaluation software optional 

Quality inspection:

scale measurement on the same system optional

Typical conditions of use

industrial continuous operation (24/7)

Marking

each scale can be individually labelled.

Measuring systems

MR_Messtechnik_Komplett

Key features 

  • Magnetically coded scales allow the use of a wide variety of components (scale carriers)
  • Incremental or absolute measuring systems for determining the position are possible
  • Position resolution of 5 nm achievable
  • OptoMag evaluation electronics provide an industry-standard output signal of 1 Vpp/ 20 µm period length. Other period lengths on request
  • Adaptation to any control system possible
  • Specially designed for use in dirty environments
  • Scale encoding is carried out very precisely with a laser interferometer
  • Customer-specific scales can be realised
  • Evaluation electronics and sensor available separately (in case of space problems) or integrated
  • Vacuum compatible

Hydra-Controllers

Hydra Start

Technical Data

Parameter

Unit

Typical performance characteristics

DC link voltage

Vac

0 … 48

Max. Phase current

A

2,5 … 50

Supported motor types 

mm/s2

Linear-, Stepper-, Voice Coil- Servo-, DC-Motoren

Position resolution

nm

5 … 1000

Real-time trigger


Interface compatibility


Manual control units


Safety functions 

Hydra XP – the most powerful

Hydra Xp

Main features

  • 4 axes in 1 housing
  • Power supply: 48 volts
  • Power: 1600 watts
  • Phase current: max. 50 A

Hydra RM – fits in any control cabinet

Hydra RM

Main features

  • 4 axes in 1 housing
  • Power supply: 24 V / 48 V
  • Power: 1000 watts
  • Phase current: max. 15 A

Hydra TT – Table version

Hydra Start

Main features

  • 2-axis
  • Power supply: 24 V / 48V
  • Power: 300 watts
  • Current in 2-phase operation: max. 10 A
  • Current in 3-phase operation: max. 5 A
  • Interfaces: CAN, RS232, Ethernet

Hydra CM – with compact design

Hydra CM

Main features 

  • 2-axis
  • Power supply: 24 V / 48 V
  • Power: max. 500 W
  • Phase current: 10 A (24 V) / 5 A (48 V)
  • External 24 V / 48 V power supply unit
  • Suitable for mounting in control cabinet
  • Compact design enables mounting directly on positioning mechanisms

Hydra DT – with Joystick

Hydra DT

Main features 

  • 2-axis
  • Power supply: 24 V / 48 V
  • Power: 150 watts
  • Phase current: max. 10 A (24V) / 5 A (48V)
  • 6 freely programmable function keys

Andromeda-Controllers

Andromeda

Technical Data

Parameter

Unit

Typical performance characteristics

DC link voltage

Vac

0 … 48

Max. Phase current

A

2,5 … 50

Supported motor types 

mm/s2

Linear-, Stepper-, Voice Coil- Servo-, DC-Motoren

Position resolution

nm

5 … 1000

Real-time trigger


Interface compatibility


Manual control units


Safety functions 

Andromeda CM

Andromeda CM

Main features 

  • Up to 6 axes
  • Power supply: 24 V to 48 V
  • Power: 200 W
  • Phase current: 3 A

Andromeda TT – Table version

Andromeda tt

Main features 

  • 3 axis
  • DC link voltage: 24 V / 48V
  • Power: 200 W
  • Phase current: 5 A 
  • Interfaces: CAN, RS232, Ethernet, USB

Andromeda Base Controller

Andromeda base

Main features 

  • 2-axis
  • Power supply: 24 V / 48V
  • Power: 300 watts
  • Current in 2-phase operation: max. 10 A
  • Current in 3-phase operation: max. 5 A
  • Interfaces: CAN, RS232, Ethernet

Pollux-Controllers

Pollux

Technical Data

Parameter

Unit

Typical performance characteristics

DC link voltage

Vac

0 … 48

Max. Phase current

A

2,5 … 50

Supported motor types 

mm/s2

Linear-, Stepper-, Voice Coil- Servo-, DC-Motoren

Position resolution

nm

5 … 1000

Real-time trigger


Interface compatibility


Manual control units


Safety functions 

Pollux-Box

Pollux Box

Main features 

  • Control and motors as separate positioning unit
  • High flexibility

Pollux OEM-Variants

Pollux OEM

Main features 

• Available as built-in variants without housing

Gantry Positioning System PT15

Gantrysystem

Technical Data

Parameter

Unit

Typical performance characteristics 

Travel speed in X

m/s

0.5 … 2.5

Travel speed in Y

m/s

0.5 … 0.8

Acceleration in X

m/s2

5 … 50

Acceleration in Y

m/s2

0.5 … 5

Repeatability bidirectional

µm

≤ ±0.5 … ≤ ±2.5

Positioning accuracy bidirectional

µm

≤ ±10 … ≤ ±50

Resolution 

nm

50 … 500