MODULES
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Modules from ITK

The modular design of all ITK systems is the basis of our flexibility. Our assemblies are subdivided according to the type of movement. The three superordinate assembly categories result in a wide range of linear tables, cross tables and rotary tables. In this context, the interaction with the ITK controls developed in-house should be emphasised.

The control technology is our origin and the decisive factor in exploiting the full performance potential of the mechatronic assemblies. Talk to us about how our in-house software and electronics development can implement your special requirements in a customised way.

Rotary Stages

The extremely flat rotary tables with very high demands on axial run-out, concentricity, repeatability and overall height are among the absolute top class on the market. The central hollow shaft for the feed-through of cables, vacuum or connectors also proves to be particularly advantageous. The rotary tables are intended for applications in the optical industry for measuring and bonding lenses, in measuring machines of all kinds, wire bonding machines or in the semiconductor industry in inspection systems for testing wafers.

Comparison Rotary Stages

Product	Repeatability	Axial run-out	Concentricity	Mass to be moved	Hollow Shaft	Diameter (in mm)
FRS Flat Rotary Stage	■ ■ ■	■ ■	■ ■	■ ■ ■	■ ■ ■	100, 200
RS Rotary Stage	■	■ ■ ■	■ ■ ■	■ ■	■ ■ ■	50, 100, 200, 250, 300

Linear Stages

Precision, dynamics and long-term stability form the basis for high throughput rates and reliable operation. Thanks to a new type of linear motor, they are a good alternative to spindle or piezo drives. They are supplied with powerful controllers and other accessories and offer unsurpassed precision. High-quality guides ensure optimum rigidity, damping and running accuracy, resulting in unsurpassed precision.

Comparison Linear Stages

Product	Repeatability	Travel Speed	Acceleration	Mass to be moved	Travel Path
FLS 100	■ ■ ■	■ ■ ■	■ ■ ■	■ ■	■ ■ ■
LS	■ ■	■ ■	■ ■ ■	■ ■ ■	■ ■ ■
ST9 Eco	■	■	■ ■	■ ■ ■	■ ■ ■
STK 50	■	■	■	■	■

Cross Stages

Cross stages from ITK are extremely compact, flat and designed for different travels and accuracies.

Comparison Cross Stages

Product	Repeatability	Travel Speed	Acceleration	Mass To Be Moved	Travel Path	Basic Technology
FCS - ABC (Flat Cross Stage)	■ ■ ■	■ ■ ■	■ ■ ■	■ ■	■ ■	FLS
KL - XY - ABC (Cross Stage Linear)	■ ■	■ ■	■ ■ ■	■ ■ ■	■ ■ ■	LS
KS - XY - ABC(Cross Stage Spindle)	■	■	■ ■	■ ■ ■	■ ■ ■	ST

Nomenclature:

ABC = travel: typically 100 mm

XY: track width of the guide, typically 9, 12, 15 mm

Parameter	Unit	Typical performance characteristics
Repeatability	arcsec	2 … 36
Axial runout	µm	3 … 10
Radial runout	µm	3 … 20
Mass to be moved	kg	5 … 10
Hollow shaft	mm	40 … 50
Diameter	mm	100, 200

Parameter	Unit	Typical performance characteristics
Repeatability	arcsec	2 … 36
Axial runout	µm	3 … 10
Radial runout	µm	3 … 20
Mass to be moved	kg	5 … 10
Hollow shaft	mm	40 … 50
Diameter	mm	50 … 300

Parameter	Unit	Typical performance characteristics
Repeat accuracy	µm	0.1 … 50
Traversing speed	mm/s	0.01 … 5000
Acceleration	mm/s²	100 mm/s² … 5 g
Position resolution	nm	5 … 1000
Travel path	mm	10 … 10.000

Parameter	Unit	Typical performance characteristics
Repeatability	µm	0.1 … 50
Traversing speed	mm/s	0.01 … 5000
Acceleration	mm/s²	100 mm/s² … 5 g
Position resolution	nm	5 … 1000
Travel path	mm	10 … 10000

Parameter	Unit	Typical performance features
Repeatability	µm	0.1 … 50
Travel speed	mm/s	0.01 … 5000
Acceleration	mm/s²	100 mm/s² … 5 g
Position resolution	nm	5 … 1000
Travel path	mm	10 … 10000

Parameters	Typical performance characteristics
Scale lengths	50 - 5000 mm
Materials	hard magnetic, elastomer-bonded and plastic bonded material
Track widths	1 - 5 mm
Number of tracks	1 - 3, several coded tracks possible
Period lengths	500 - 5000 µm
Accuracy	up to the sub-µm range (compensated)
Resolution	in the nanometre range
Writing method	digital or analogue
Software	customised operating and evaluation software
Quality inspection	scale measurement on the same system
Typical operating conditions	industrial continuous operation (24/7)
Labelling	each scale can be individually marked

Parameter	Unit	Typical performance characteristics
Load capacity	kg	0.5 … 5
Travel speed in X & Y	m/s	0.25 ... 1
Acceleration in X & Y	m/s²	0.5 … 10
Repeatability bidirectional	µm	≤ ±1
Positioning accuracy bidirectional	µm	≤ ±20 … ≤ ±80
Resolution	nm	500

Parameter	Typical performance characteristics
Scale diameter	3.5 - 500 mm (standard)
Scale materials	hard magnetic, elastomer and plastic bonded material
Coding placement	optional radial or axial description
Number of lines	freely selectable
Number of tracks:	several coded tracks possible; reference marks (polarisation adjustable)
Repeatability:	from 5 arcsec (depending on reference measuring system and material)
Resolution	up to 0.5 arcsec
Writing method	digital or analogue
Software	customised operating and evaluation software optional
Quality inspection:	scale measurement on the same system optional
Typical conditions of use	industrial continuous operation (24/7)
Marking	each scale can be individually labelled.

Parameter	Unit	Typical performance characteristics
DC link voltage	Vac	0 … 48
Max. Phase current	A	2,5 … 50
Supported motor types	mm/s²	Linear-, Stepper-, Voice Coil- Servo-, DC-Motoren
Position resolution	nm	5 … 1000
Real-time trigger		✓
Interface compatibility		✓
Manual control units		✓
Safety functions		✓

MODULES FROM ITK.

Modules from ITK

Rotary Stages

Comparison Rotary Stages

Linear Stages

Comparison Linear Stages

Cross Stages

Comparison Cross Stages

Nomenclature:

CONTACT

QUICKLINKS

Rotary Stage FRS 200

Rotary Stage RS 180

Linear Stage FLS100

Linear Stage ST9 Eco

Linear Stage STK 50

Linear Stage LS

Cross Stage FCS100

Cross Stage KL12

Cross Stage KS15

LMT Microscope Stages

LMP linear magnetisation machines

Stepper motors

Alpha Torque servomotors

Gantry Positioning System FBS

RMP Rotary Magnetisation Machines

Measuring systems

Hydra-Controllers

Hydra XP – the most powerful

Hydra RM – fits in any control cabinet

Hydra TT – Table version

Hydra CM – with compact design

Hydra DT – with Joystick

Andromeda-Controllers

Andromeda CM

Andromeda TT – Table version

Andromeda Base Controller

Pollux-Controllers

Pollux-Box

Pollux OEM-Variants

Gantry Positioning System PT15

MODULES
FROM ITK.