MODULES
FROM ITK.

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Modules

03

Modules from ITK

The modular design of all ITK systems is the basis of our flexibility. Our assemblies are subdivided according to the type of movement. The three superordinate assembly categories result in a wide range of linear tables, cross tables and rotary tables. In this context, the interaction with the ITK controls developed in-house should be emphasised.

The control technology is our origin and the decisive factor in exploiting the full performance potential of the mechatronic assemblies. Talk to us about how our in-house software and electronics development can implement your special requirements in a customised way.

Rotary Stages
FRS200_für Baugruppenheader

Rotary Stages

The extremely flat rotary tables with very high demands on axial run-out, concentricity, repeatability and overall height are among the absolute top class on the market. The central hollow shaft for the feed-through of cables, vacuum or connectors also proves to be particularly advantageous. The rotary tables are intended for applications in the optical industry for measuring and bonding lenses, in measuring machines of all kinds, wire bonding machines or in the semiconductor industry in inspection systems for testing wafers.

Comparison Rotary Stages

Product

Repeatability

Axial run-out

Concentricity 

Mass to be moved

Hollow Shaft

Diameter (in mm) 

FRS

Flat Rotary Stage

■ ■ ■

■ ■

■ ■

■ ■ ■

■ ■ ■

100, 200

RS

Rotary Stage

■ ■ ■

■ ■ ■

■ ■

■ ■ ■

50, 100, 200, 250, 300

Linear Stages
Lineartische

Linear Stages

Precision, dynamics and long-term stability form the basis for high throughput rates and reliable operation. Thanks to a new type of linear motor, they are a good alternative to spindle or piezo drives. They are supplied with powerful controllers and other accessories and offer unsurpassed precision. High-quality guides ensure optimum rigidity, damping and running accuracy, resulting in unsurpassed precision.

Comparison Linear Stages

Product

Repeatability

Travel Speed

Acceleration

Mass to be moved

Travel Path

FLS 100

■ ■ ■

■ ■ ■

■ ■ ■

■ ■

■ ■ ■

LS

■ ■

■ ■

■ ■ ■

■ ■ ■

■ ■ ■

ST9 Eco

■ ■

■ ■ ■

■ ■ ■

STK 50

Cross Stages
Kreuztische

Cross Stages

Cross stages from ITK are extremely compact, flat and designed for different travels and accuracies.

Comparison Cross Stages


Product


Repeatability


Travel Speed


Acceleration

Mass To Be Moved

Travel Path

Basic Technology

FCS - ABC

(Flat Cross Stage)


■ ■ ■


■ ■ ■


■ ■ ■


■ ■


■ ■


FLS

KL - XY - ABC (Cross Stage Linear)



■ ■



■ ■



■ ■ ■



■ ■ ■



■ ■ ■



LS


KS - XY - ABC(Cross Stage Spindle)




■ ■


■ ■ ■


■ ■ ■


ST

Nomenclature:

ABC = travel: typically 100 mm

XY: track width of the guide, typically 9, 12, 15 mm

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Rotary Stage FRS 200

Rundtisch frs200_02

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeatability

arcsec

2 … 36

Axial runout

µm

3 … 10

Radial runout

µm

3 … 20

Mass to be moved

kg

5 … 10

Hollow shaft

mm

40 … 50

Diameter

mm

100, 200

Rotary Stage RS 180

Rundtisch rs 180

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeatability

arcsec

2 … 36

Axial runout

µm

3 … 10

Radial runout

µm

3 … 20

Mass to be moved

kg

5 … 10

Hollow shaft

mm

40 … 50

Diameter

mm

50 … 300

Linear Stage FLS100

Lineartische

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeat accuracy

µm

0.1 … 50

Traversing speed

mm/s

0.01 … 5000

Acceleration

mm/s2

100 mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 10.000

Linear Stage ST9 Eco

ST9 Eco

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeatability

µm

0.1 … 50

Traversing speed

mm/s

0.01 … 5000

Acceleration

mm/s2

100 mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 10000

Linear Stage STK 50

STK 50

Technical data

Parameter

Unit

Typical performance features

Repeatability

µm

0.1 … 50

Travel speed

mm/s

0.01 … 5000

Acceleration

mm/s2

100 mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 10000

Linear Stage LS

LS

Technical data

Parameter

Unit

Typical performance features

Repeatability

µm

0.1 … 50

Travel speed

mm/s

0.01 … 5000

Acceleration

mm/s2

100 mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 10000

Cross Stage FCS100

Kreuztische

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeatability

µm

0.1 … 50

Traversing speed

mm/s

0.01 … 5000

Acceleration

mm/s2

100 mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 500

Cross Stage KL12

kl12

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeatability

µm

0.1 … 50

Traversing speed

mm/s

0.01 … 5000

Acceleration

mm/s2

100 mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 500

Cross Stage KS15

kl12

Technical Data

Parameter

Unit

Typical performance characteristics 

Repeatability

µm

0.1 … 50

Traversing speed

mm/s

0.01 … 5000

Acceleration

mm/s2

100 mm/s2 … 5 g

Position resolution

nm

5 … 1000

Travel path

mm

10 … 500